11/1/2022 0 Comments Xbar filterThis work develops a new alternative to increase the working frequency of SAW devices. The results show that the frequency can be doubled under the same critical resolution of lithography due to the shortening of wavelength, and the 3D layout of IDTs is available for SAW devices based on piezoelectric thin film or piezoelectric single crystal. The frequency and the electromechanical coupling factor (K2) of the four structures of SAW devices with the 3D layout of IDTs were studied by the finite element method (FEM). This 3D layout of IDTs dramatically narrows the horizontal gap between two adjacent electrodes, which can significantly increase the frequency. the ground electrodes on one layer and the signal electrodes on the other layer. The set of IDTs is split into two layers, i.e. This work proposes a new way for the development of high frequency SAW devices by redesigning the layout of IDT in three dimensions (3D). However, these methods have a limit due to the limited acoustic velocity and the photolithography limit. The layout of interdigital transducers (IDT) in SAW devices is in plane and the traditional methods of improving frequency for SAW devices are the increase of acoustic velocity and the reduction of wavelength. The development of mobile communication sets higher demands on high frequency surface acoustic wave (SAW) devices. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. Numerical results and measurements were calculated for comparison, and the accuracy and efficiency of the proposed method were verified. Based on a hybrid full-wave analysis, we present an example application of this approach on a TC-SAW ladder filter with 5° YX-cut LiNbO3 substrate. Combining COMSOL Multiphysics with a user-friendly interface, a flexible way of modeling and mesh generation, it can greatly reduce the complicated process of modeling and physical properties definition. Due to the advantages of PDE-based 2D-FEM, it is universal, efficient and not restricted to handling arbitrary materials and crystal cuts, electrode shapes, and multi-layered substrate. The PDE-based models of the two-dimensional finite element method (2D-FEM) are derived in detail and solved by the PDE module embedded in COMSOL Multiphysics. #XBAR FILTER SOFTWARE#The practical solid model of the radio frequency (RF) filter package is constructed in High Frequency Structure Simulator (HFSS) software and the parasitic electromagnetics of the entire package is considered in the design process. The partial differential equation (PDE) models of the physical system in question and graphics processing unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate acoustic-electric characteristics of a SAW filter. In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices is proposed to achieve accurate and fast simulation.
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